| Abstract: |
In this study, aluminum nitride (AlN) coatings on a glass substrate using a room temperature vacuum spraying have been evaluated in terms of their microstructure and mechanical properties. Submicron AlN particles were accelerated by gas flow in the nozzle up to velocity of several hundred m/s. During interaction with substrate, these particles formed a thick (1~50µm), uniform, hard and dense AlN coating. XRD and TEM analyses revealed that the AlN coating retained an initial crystal structure of hexagonal and severe particle impact formed nanocrystalline AlN grains of 20-100nm. Optimization of processing parameters including particle size, gas flow rate and nozzle-to-substrate distance produce a much dense AlN coating. Characterization of AlN coating was analyzed by nanoindentation and thermal conductivity.
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