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4846 |
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Densification of metal oxide films synthesized from a metal complex by flame apparatus |
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Keiji Komatsu / Nagaoka University of Technology, JAPAN Tomoyuki Shirai / Nagaoka University of Technology, JAPAN Ayumu Toyama/ Nagaoka University of Technology, JAPAN Takao Iseki/ Nagaoka University of Technology, JAPAN D.Y. Enkin/ Nagaoka University of Technology, JAPAN Atsushi Nakamura*/ Chubu Chelest,Nagaoka University of Technology, JAPAN Yu Li/ Nippon Steel & Sumikin Hardfacing, JAPAN Hiroyuki Muramatsu/ Nagaoka University of Technology, JAPAN Hidetoshi Saitoh/ Nagaoka University of Technology, JAPAN |
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In this study, we synthesized dense metal oxide films from a metal-ethylenediaminetetraacetic acid complex using a flame spray apparatus. Erbium oxide (Er2O3) films were synthesized on stainless steel (SUS) substrates using N2, air (O2 + N2), or O2 as the carrier gas and a H2-O2 mixture as the combustion gas. When O2 was used as the carrier gas, a 19.6-mm-thick Er2O3 layer was deposited on the SUS substrate. The cross-sectional porosity of this film was 3%. In contrast, a 5.222.0-mm -thick Er2O3 layer was synthesized on SUS substrates when N2 and air were used as the carrier gases. The cross-sectional porosities of these films were 5.923.4%. These results indicated that the carrier gas used during the synthesis process plays an important role in determining the thickness and porosity of the resulting film. |