Plasma Spray-Physical Vapor Deposition (PS-PVD) method has been used in the deposition of the quasi-columnar YSZ coating on the airfoil substrates. The fluid characteristics when the low-pressure plasma jet impinges on a double vane substrate and a single vane substrate were investigated by numerical simulation and experimental observation. The fluid vector distributions and streamlines during the plasma jet scans on the surface of the substrates were shown in this paper. The heating and motion of the nano-agglomerated YSZ powders in the low-pressure plasma jet were simulated in this work. The microstructural evolution of the coating on the cured surface of the substrate was demonstrated. The results show that the growth direction and thickness of the YSZ coating were significantly influenced by the surface curvature of the substrate. An intensified heat and mass transformation from the low-pressure plasma jet to the substrate was obtained on different airfoil substrates.