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| Abstract No.: |
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Scheduled at:
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Friday, May 06, 2022, Hall G2 12:20 PM
Characterization & Testing Methods I
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| Title: |
Electric break down strenght of suspension plasma sprayed Y2O3 coatings
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| Authors: |
Rafael Oliveira Da Silva* / Treibacher Industrie AG, Austria
Richard Trache / Treibacher Industrie AG, Austria
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| Abstract: |
Ceramic coatings are extensively employed to coat the inner surfaces and components of etching chambers where semiconductors are fabricated, with the purpose to reduce costs and particle contamination. One approach to improve the viability of semiconductor etching processes is by understanding and measuring the dielectric breakdown voltage (DBV) of these protective coatings. In this study, a high solid content (> 50 wt.%) Y2O3-suspension was used to coat aluminium substrates with average 100-µm thickness to measure its breakdown strength using different testing set-ups: (i) Dry measurement; (ii) Measurement on metallized area and (iii) Wet measurement. Based on the results, the dry and metallized area set-up exhibited (respectively 30 and 25 V/µm BDV) consistent and reproducible data, which can be a useful parameter to indicate low defect density and long exposure resistance to the dry etching process. Meanwhile, the wet measurement proved to be not useful because the measurement stopped due to ohmic behaviour and heavily arcing. Results are correlated to coating microstructures using SEM image analysis and are discussed with regards to coating process efficiency.
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