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| Abstract No.: |
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Scheduled at:
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Wednesday, March 28, 2012, SuperC, Hall Ford 2:50 PM
Innovations in EBW
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| Title: |
Efficient high speed vacuum systems for electron beam machines
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| Authors: |
Matthias Wahl* / Evobeam GmbH, Germany
Alexander Weil / Evobeam GmbH, Germany
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| Abstract: |
Is a load lock system mandatory for short pump down times to produce hard vacuum in highly productive electron seam systems? Can organic compounds in the vacuum chamber be completely avoided and which advantages does this offer to the process? How can energy consumption be minimized? Is pump maintenance still necessary? How do valves influence the cycle time? Which new degrees of freedom does this offer to mass production processes?
An innovative low energy consumption and low maintenance pumping system for electron beam machines is presented that allows pump down times to hard vacuum comparable to load lock systems without their mechanical restrictions.
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