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3933 |
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Friday, May 23, 2014, Hall A 3:20 PM Suspension Spraying 2 |
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Microstructural characterization and gas sensing properties of solution precursor plasma sprayed ZnO nanostructured films |
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Chao Zhang / Yangzhou University, China Hua Li/ Ningbo Institute of Materials Technology & Engineering, China Pengjiang He/ Université de technologie Belfort-Montbéliard, France Marie-Pierre Planche/ Université de technologie Belfort-Montbéliard, France Marie-George Olivier/ University of Mons, Belgium Marc Debliquy/ University of Mons, Belgium Hanlin Liao/ Université de technologie Belfort-Montbéliard, France Christophe Verdy*/ Université de technologie Belfort-Montbéliard, |
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ZnO nanostructured films have been prepared on Al2O3 substrates fitted with interdigitated Au electrodes on one side and a Pt heater on the other side, and explored as a gas sensor for NO2 detection. ZnO films were prepared by solution precursor plasma spray (SPPS) and zinc acetate Zn(CH3COO)2 aqueous solution was used as spraying precursor solution. The SPPS process has proven its simplicity and reliability in realizing polycrystalline in ZnO films as verified by the XRD structural analysis. The FE-SEM images confirmed that the ZnO films are nanostructured with grain size ranging from 50 to 200 nm. The surface morphology and grain size of ZnO films changed when the H2 gas flow rate in plasma forming gas changed from 5 to 8 l/min. The electrical characterization of the sprayed thin films shows that they have good response when the sensors were exposed to sub-ppm NO2 in air. The obtained sensors have almost stable response when the humidity changed from 20-80%. |