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4722 |
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Tuesday, May 10, 2016, Auditorium 2:40 PM Suspension Spraying I |
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Influence of particle size and spray parameters on formation of dense yttria coatings by suspension plasma spraying |
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Junya Kitamura* / Oerlikon Metco (Japan) Ltd, Japan Kazuya Fujimori / Oerlikon Metco (Japan) Ltd., Japan Jing Liu/ Oerlikon Metco (US) Inc., USA Brian Callen/ Oerlikon Metco (Canada) Inc., Canada Tetsuyoshi Wada/ Oerlikon Metco (Japan) Ltd, Japan |
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Dense yttria coatings are expected in electronics industries because they have possibility to improve the properties of erosion resistance and decreasing particle size during dry etching processes compared with conventional atmospheric plasma spraying (APS). Suspension spraying is considered as one of the technologies to attain such coatings with affordable production cost and high deposition rate. In this study, influence of particle size in ethanol base suspension and spray parameters, such as plasma gases, plasma power, nozzle size and spray distance have been investigated to form dense yttria coatings successfully using suspension plasma spraying (SPS) with cascaded arc torch. Particle size has much influence on formation of coatings, where sub-micron size is difficult to have hard and dense structure. Micron sized, 2 micron in this study, is found to be suitable in contrast. Coating structure has been changed with changing spray distance sensitively than APS, suggesting that careful and precise control will be required in parameter development. |