Authors: |
Zexin Yu* / University Bourgogne Franche-Comté, France Yongli Zhao/ ICB UMR 6303, CNRS, UTBM, Université deBourgogne Franche-Comté, France Jibo Huang/ Key Lab of Safety Science of Pressurized System, Ministry of Education, School of Mechanical and Power Engineering, East China University of Science and Technology, China Zhengqu Feng/ Key Lab of Safety Science of Pressurized System, Ministry of Education, School of Mechanical and Power Engineering, East China University of Science and Technology, China Weize Wang/ Key Lab of Safety Science of Pressurized System, Ministry of Education, School of Mechanical and Power Engineering, East China University of Science and Technology, France Michel Moliere/ ICB UMR 6303, CNRS, UTBM, Université deBourgogne Franche-Comté, France Hanlin Liao/ ICB UMR 6303, CNRS, UTBM, Université deBourgogne Franche-Comté, France
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Abstract: |
ZnO films were deposited by solution precursor plasma spray (SPPS) process with different substrate preheating temperatures and hydrogen flow rates in plasma. For increasing both substrate temperature and plasma power, the hexagonal flake shape of each particle becomes more and more obviously. In particular, with the increment of plasma power, the whole trend of the microstructure of ZnO film also becomes denser with larger hexagonal sheets. In contrast, through augmenting the substrate temperature, it seems only induces more sharp shape of each particle without apparent growth of particle size and densification of film. The preferential oriented peaks of ZnO have been changed with different spraying conditions. Increasing preheating temperature from 0 to 600 oC, the most intense peak shifted from (002) peak to (101) peak, which is more corresponding to the standard x-ray diffraction pattern of ZnO. By adjusting the hydrogen flow rate, the main trend for the preferential oriented plane is also from (002) peak to (101) peak of x-ray diffraction pattern. In terms of some specific application of SPPS deposited metal oxides films, such as gas sensor, photocatalyst, transparent conductive oxides, choosing middle preheating temperature and suitable hydrogen rate will induce unusual oriented peaks, which is very favorable for optical, electrical, electrochemical properties.
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