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5494 |
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Wednesday, June 07, 2017, Hall 27 2:40 PM Suspension Spraying I |
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Characteristics of dense Al2O3 coating prepared by suspension plasma spraying |
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Hiroyuki Ibe* / FUJIMI Incorporated, Japan Takaya Masuda/ Fujimi Incorporated, Japan Kazuto Sato/ Fujimi Incorporated, Japan Nobuaki Kato/ Fujimi Incorporated, Japan |
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Sintering ceramics are widely used in industries which require electrical and mechanical properties. Thermal sprayed ceramics coatings are also applied for the industries, however the coating which has micron size pores are limited their applications due to inferior electrical and mechanical properties than sintering bulk. To expand thermal sprayed ceramics coating applications, dense coatings prepared by suspension plasma spraying are widely studied. Dense Al2O3 coatings are applicable to fabricating equipment for electronics devices, such as ESC. There are no reports regarding plasma sprayed dense Al2O3 coating. In this study to achieve a dense Al2O3 coating, suspension properties such as particle size distribution, concentration and spray parameters are investigated. Suspension materials prepared with different sizes of fine aluminum oxides powder are sprayed by high power suspension plasma spraying system. Surface morphologies of the slurry coatings with splats are similar to conventional plasma-sprayed Alumina coatings, identified from microstructural analysis by field emission SEM in this study. Spray conditions, gas flow rate and stand off affect the coating density and mechanical properties. Mechanism of coating formation by plasma spraying with fine powder slurries will be discussed based on the findings. Alumina coatings obtained by the plasma spraying is applied for application to application utilizing the electrical insulation properties of such electronics devise manufacturing equipment components is proceeding |